WAVE-GUIDING STRUCTURES IN POLYMERS BY ION-IMPLANTATION

被引：7

作者：

BRUNNER, S

RUCK, DM

FRANK, WFX

LINKE, F

SCHOSSER, A

BEHRINGER, U

机构：

[1] GERMAN TELEKOM RES CTR,DARMSTADT,GERMANY

[2] IBM CORP,DEUTSCHLAND GMTC,STUTTGART,GERMANY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 89卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(94)95203-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Optical waveguides have been produced by ion irradiation of the surface of polymer blocks of poly-(methyl-meth-acrylate) (PMMA). ion energies in the range of keV and MeV have been used. Mask construction is described. Strip waveguides, branches and Mach-Zehnder interferometers were generated. The refractive index as a function of the depth will be discussed.

引用

页码：373 / 378

页数：6