GERMANIUM PIEZORESISTIVE ELEMENT ON A FLEXIBLE SUBSTRATE

被引：14

作者：

EDWARDS, WD

BEAULIEU, RP

机构：

[1] Communications Research Centre, Ottawa, Ont., Shirley Bay

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1969年 / 2卷 / 07期

关键词：

D O I：

10.1088/0022-3735/2/7/314

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Thin film strain gauge elements have been made from polycrystalline germanium films deposited upon a very flexible substrate. Devices with gauge factors up to about 100 and with a frequecny response to at least 80 kHz and with reasonable long term stability have been obtained in devices deposited upon a 0·001 inch thick Kapton film.

引用

页码：613 / &

共 6 条

[1] BARALIS G, 1966, P IERE IEE C APPLICA, pCH6
[2] CULLITY BD, 1956, ELEMENTS XRAY DIFFRA, pCH9
[3] THE EFFECT OF VACUUM-EVAPORATION PARAMETERS ON THE STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF THIN GERMANIUM FILMS
DAVEY, JE
TIERNAN, RJ
PANKEY, T
MONTGOMERY, MD
[J]. SOLID-STATE ELECTRONICS, 1963, 6 (03) : 205 - &
[4] ONUMA Y, 1966, ELECTR ENG JPN, V86, P1
[5] PIEZORESISTANCE EFFECT IN GERMANIUM AND SILICON
SMITH, CS
[J]. PHYSICAL REVIEW, 1954, 94 (01): : 42 - 49
[6] TEXTURAL AND ELECTRICAL PROPERTIES OF VACUUM-DEPOSITED GERMANIUM FILMS
WILLIAMS, JD
TERRY, LE
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (2P1) : 158 - &

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