ION IMPLANTATION DEPTH DISTRIBUTIONS - ENERGY DEPOSITION INTO ATOMIC PROCESSES AND ION LOCATIONS

被引：33

作者：

BRICE, DK

机构：

来源：

关键词：

D O I：

10.1063/1.1653112

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：103 / &

共 12 条

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