CHARACTERISTICS OF ADHESION BETWEEN PHOTORESIST AND INORGANIC SUBSTRATE

被引：26

作者：

NAGATA, H

KAWAI, A

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 10期

关键词：

D O I：

10.1143/JJAP.28.2137

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2137 / 2141

页数：5

共 9 条

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ALLEN, KW ;

STEVENS, MG .

[2]

CARRE A, 1984, J ADHESION, V18, P171

GUPTA, TK .

[4]

HASEGAWA N, 1975, 8TH P S SEM INT CIRC, P43

KAELBLE, DH .

[6]

LUSSOW RO, 1968, J ELECTROCHEM SO JUN, P660

[7]

MITOH M, 1987, J ADHESION SOC JPN, V23, P56

[8] ROLE OF INTERFACE IN ADHESION PHENOMENA [J].

MITTAL, KL .

[9]

SUMIYA K, 1982, SETCHAKU KYOKAI SHI, V18, P345