ELECTRONICALLY-SCANNED WHITE-LIGHT INTERFEROMETRY WITH ENHANCED DYNAMIC-RANGE

被引:20
作者
CHEN, S [1 ]
MEGGITT, BT [1 ]
ROGERS, AJ [1 ]
机构
[1] SIRA INST LTD,CHISLEHURST BR7 5EH,KENT,ENGLAND
关键词
Interferometers; Measurement;
D O I
10.1049/el:19901065
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
When a CCD array is used to detect the spatial fringes of optical interference, interesting features emerge in the output as the width of each fringe approaches the dimension of a CCD sensing cell. These features are theoretically studied and their application to the enhancement of the dynamic operating range of electrically scanned white-light interferometry is investigated. Preliminary experimental results are presented. © 1990, The Institution of Electrical Engineers. All rights reserved.
引用
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页码:1663 / 1665
页数:3
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