PROPERTIES AND STABILITY OF DIAMOND-LIKE CARBON-FILMS RELATED TO BONDED AND UNBONDED HYDROGEN

被引：39

作者：

MARTINU, L ^{[1
]}

RAVEH, A ^{[1
]}

BOUTARD, D ^{[1
]}

HOULE, S ^{[1
]}

POITRAS, D ^{[1
]}

VELLA, N ^{[1
]}

WERTHEIMER, MR ^{[1
]}

机构：

[1] ECOLE POLYTECH,DEPT ENGN PHYS,MONTREAL H3C 3A7,QUEBEC,CANADA

来源：

基金：

加拿大自然科学与工程研究理事会;

关键词：

D O I：

10.1016/0925-9635(93)90202-D

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Hydrogenated amorphous carbon (a-C: H) films with diamond-like characteristics have been deposited in dual-mode microwave-radio-frequency discharges in methane or methane-argon mixtures. Comparative measurements by elastic recoil detection and Fourier transform IR spectroscopy have been used to evaluate the amount of chemically bonded (IR-active) and unbonded (IR-inactive) hydrogen in the films. Three categories of structures have been distinguished: (a) hard hydrocarbon with hydrogen predominantly bonded, (b) hard hydrocarbon with hydrogen predominantly unbonded and (c) a mixture of hard hydrocarbon and polymer-like phases. Film properties such as refractive index (1.8- 2.5), resistivity (10(12)-10(17) OMEGA cm) and thermal stability (between 25 and 550-degrees-C) are correlated with the amount of bonded hydrogen.

引用

页码：673 / 677

页数：5

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