FUNDAMENTAL STUDIES ON QUANTITATIVE-ANALYSIS IN ION PROBE MICROANALYZER

被引:32
作者
SHIMIZU, R [1 ]
ISHITANI, T [1 ]
UESHIMA, Y [1 ]
机构
[1] OSAKA UNIV,DEPT APPL PHYS,SUITA,JAPAN
关键词
D O I
10.1143/JJAP.13.249
中图分类号
O59 [应用物理学];
学科分类号
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页码:249 / 255
页数:7
相关论文
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