STRUCTURE OF ORGANOMETALLIC CHEMICAL-VAPOR-DEPOSITED BATIO3 THIN-FILMS ON LAALO3

被引：21

作者：

CHEN, J ^{[1
]}

WILLS, LA ^{[1
]}

WESSELS, BW ^{[1
]}

SCHULZ, DL ^{[1
]}

MARKS, TJ ^{[1
]}

机构：

[1] NORTHWESTERN UNIV,DEPT CHEM,EVANSTON,IL 60208

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1993年 / 22卷 / 06期

关键词：

BATIO3; LAALO3; HRTEM; OMCVD;

D O I：

10.1007/BF02666421

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

BaTiO3 thin films grown on LaAlO3 by organometallic chemical vapor deposition were characterized with cross-sectional high resolution transmission electron microscopy. Epitaxy was confirmed for the films grown on (100) oriented substrates. The films displayed an a axis orientation. The interface between the film and substrate was nearly atomically abrupt. Partial relaxation of the films was observed as a result of misfit dislocation formation.

引用

页码：701 / 703

页数：3

共 10 条

[1] EPITAXIAL-GROWTH OF BATIO3 THIN-FILMS BY PLASMA-ENHANCED METALORGANIC CHEMICAL VAPOR-DEPOSITION
CHERN, CS
ZHAO, J
LUO, L
LU, P
LI, YQ
NORRIS, P
KEAR, B
COSANDEY, F
MAGGIORE, CJ
GALLOIS, B
WILKENS, BJ
[J]. APPLIED PHYSICS LETTERS, 1992, 60 (09) : 1144 - 1146
[2] EPITAXIAL-GROWTH OF THIN-FILMS OF BATIO3 USING EXCIMER LASER ABLATION
DAVIS, GM
GOWER, MC
[J]. APPLIED PHYSICS LETTERS, 1989, 55 (02) : 112 - 114
[3] DRAVID VP, IN PRESS J MAT RES
[4] FUJIMOTO K, 1988, THIN SOLID FILMS, V169, P49
[5] CRYSTALLOGRAPHIC STUDIES OF PEROVSKITE-LIKE COMPOUNDS .2. RARE EARTH ALUMINATES
GELLER, S
BALA, VB
[J]. ACTA CRYSTALLOGRAPHICA, 1956, 9 (11): : 1019 - 1025
[6] PREPARATION OF FERROELECTRIC BATIO3 THIN-FILMS BY ACTIVATED REACTIVE EVAPORATION
IIJIMA, K
TERASHIMA, T
YAMAMOTO, K
HIRATA, K
BANDO, Y
[J]. APPLIED PHYSICS LETTERS, 1990, 56 (06) : 527 - 529
[7] LINES ME, 1977, PRINCIPLES APPLICATI
[8] TEMPERATURE CHANGES IN THE CRYSTAL STRUCTURE OF BARIUM TITANIUM OXIDE
MEGAW, HD
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1947, 189 (1017): : 261 - &
[9] ROY RA, 1990, MATER RES SOC SYMP P, V200, P141, DOI 10.1557/PROC-200-141
[10] EPITAXIAL-GROWTH OF BATIO3 THIN-FILMS BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION
WILLS, LA
WESSELS, BW
RICHESON, DS
MARKS, TJ
[J]. APPLIED PHYSICS LETTERS, 1992, 60 (01) : 41 - 43

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