MASS-SPECTROMETRY STUDY OF ZNS ATOMIC LAYER EPITAXY PROCESS

被引：16

作者：

HYVARINEN, J

SONNINEN, M

TORNQVIST, R

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1988年 / 86卷 / 1-4期

关键词：

D O I：

10.1016/0022-0248(90)90797-O

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：695 / 699

页数：5

共 14 条

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