RELIABLE SINGLE-TARGET SPUTTERING PROCESS FOR HIGH-TEMPERATURE SUPERCONDUCTING FILMS AND DEVICES

被引：111

作者：

SANDSTROM, RL

GALLAGHER, WJ

DINGER, TR

KOCH, RH

LAIBOWITZ, RB

KLEINSASSER, AW

GAMBINO, RJ

BUMBLE, B

CHISHOLM, MF

机构：

来源：

关键词：

D O I：

10.1063/1.100615

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：444 / 446

页数：3

共 21 条

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