COPPER SULFIDE FILMS DEPOSITED BY CYLINDRICAL MAGNETRON REACTIVE SPUTTERING

被引：16

作者：

JONATH, AD ^{[1
]}

ANDERSON, WW ^{[1
]}

THORNTON, JA ^{[1
]}

CORNOG, DG ^{[1
]}

机构：

[1] TELIC CORP,SANTA MONICA,CA 90404

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 02期

关键词：

D O I：

10.1116/1.569907

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：200 / 203

页数：4

共 15 条

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[2]

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[5]

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[7] STOICHIOMETRY OF SURFACES IN CADMIUM-SULFIDE THIN-FILMS [J].

HILL, R ;

EDWARDS, IAS .

VACUUM, 1977, 27 (04) :277-280

[8]

Idrichan G. Z., 1975, Inorganic Materials, V11, P1449

[9] OPTICAL PROPERTIES OF CRYSTALS OF CUPROUS SULFIDES (CHALCOSITE, DJURLEITE, CU1.9S, AND DIGENITE) [J].

MULDER, BJ .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1972, 13 (01) :79-&

[10] ELECTRICAL AND OPTICAL PROPERTIES OF CU2-XS(0+-X+-0.2 [J].

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JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1968, 25 (01) :290-&

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