COMPARISON OF FILM THICKNESS TOLERANCES IN WAVE-GUIDE GRATING COUPLERS

被引：8

作者：

EMMONS, RM

HALL, DG

机构：

[1] The Institute of Optics, University of Rochester, Rochester, NY

来源：

OPTICS LETTERS | 1991年 / 16卷 / 13期

关键词：

D O I：

10.1364/OL.16.000998

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The effect of guiding-layer thickness variations on grating coupler performance is investigated for three important material systems. The sensitivity of the coupling length and coupling efficiency of these structures to guiding-layer thickness changes differs markedly between the glass, gallium arsenide, and silicon-on-insulator waveguides studied.

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收藏

页码：998 / 1000

页数：3

相关论文

共 14 条

[1]

ACTON FS, 1970, NUMERICAL METHODS WO, P374

[2] HIGH-EFFICIENCY BLAZED GRATING COUPLERS [J].

AOYAGI, T ;

AOYAGI, Y ;

NAMBA, S .

APPLIED PHYSICS LETTERS, 1976, 29 (05) :303-304

[3] SCATTERING AND GUIDING OF WAVES BY DIELECTRIC GRATINGS WITH ARBITRARY PROFILES [J].

CHANG, KC ;

SHAH, V ;

TAMIR, T .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1980, 70 (07) :804-813

[4] SIMPLIFIED APPROACH TO SURFACE-WAVE SCATTERING BY BLAZED DIELECTRIC GRATINGS [J].

CHANG, KC ;

TAMIR, T .

APPLIED OPTICS, 1980, 19 (02) :282-288

[5] THIN GRATING COUPLERS FOR INTEGRATED OPTICS - EXPERIMENTAL AND THEORETICAL-STUDY [J].

DALGOUTTE, DG ;

WILKINSON, CDW .

APPLIED OPTICS, 1975, 14 (12) :2983-2998

[6]

DELAVAUX JMP, 1984, APPL OPTICS, V23, P304

[7] THEORY AND EXPERIMENTS ON GRATING COUPLERS FOR THIN-FILM WAVEGUIDES [J].

GHIZONI, CC ;

CHEN, BU ;

TANG, CL .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1976, 12 (02) :69-73

[8] SPUTTERED GLASS WAVEGUIDE FOR INTEGRATED OPTICAL CIRCUITS [J].

GOELL, JE ;

STANDLEY, RD .

BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (10) :3445-+

[9] OPTICAL WAVE-GUIDES IN OXYGEN-IMPLANTED BURIED-OXIDE SILICON-ON-INSULATOR STRUCTURES [J].

KURDI, BN ;

HALL, DG .

OPTICS LETTERS, 1988, 13 (02) :175-177

[10]

LEONBERGER FJ, 1988, SPRINGER SERIES ELEC, V26, P217