EXAMINATION OF CCDS USING VOLTAGE CONTRAST WITH A SCANNING ELECTRON-MICROSCOPE

被引：3

作者：

RODMAN, JK ^{[1
]}

BOYD, JT ^{[1
]}

机构：

[1] UNIV CINCINNATI,DEPT ELECT & COMP ENGN,SOLID STATE ELECTR LAB,CINCINNATI,OH 45221

来源：

SOLID-STATE ELECTRONICS | 1980年 / 23卷 / 10期

关键词：

D O I：

10.1016/0038-1101(80)90179-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：1029 / 1033

页数：5

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