HIGHLY SENSITIVE CAPACITANCE MEASUREMENT FOR SENSORS

被引：5

作者：

MARLOW, BK

GREAGER, DC

KEMP, R

MOORE, MB

机构：

[1] Industrual Research Ltd., Lower Hutt

来源：

ELECTRONICS LETTERS | 1993年 / 29卷 / 21期

关键词：

CAPACITANCE MEASUREMENT; ACCELEROMETERS;

D O I：

10.1049/el:19931227

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Very small capacitance changes from a capacitive transducer can be measured using a custom-designed signal-processing chip. The chip features a switched-capacitor integrator with chopper stabilisation to remove the effects of offset, 1/f noise and switch charge injection; the circuit is insensitive to stray capacitance. The achievement of high resolution and low drift is demonstrated.

引用

页码：1844 / 1845

页数：2