MEASUREMENT OF SUPERLATTICE OPTICAL-PROPERTIES BY VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY

被引：11

作者：

SNYDER, PG

DE, BN

MERKEL, KG

WOOLLAM, JA

LANGER, DW

STUTZ, CE

JONES, R

RAI, AK

EVANS, K

机构：

[1] AVION LAB,DAYTON,OH 45433

[2] UNIVERSAL ENERGY SYST,DAYTON,OH 45432

来源：

SUPERLATTICES AND MICROSTRUCTURES | 1988年 / 4卷 / 01期

关键词：

D O I：

10.1016/0749-6036(88)90273-X

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：97 / 99

页数：3

共 11 条

[1] OPTICAL-PROPERTIES OF GAAS AND ITS ELECTROCHEMICALLY GROWN ANODIC OXIDE FROM 1.5 TO 6.0 EV [J].

ASPNES, DE ;

SCHWARTZ, GP ;

GUALTIERI, GJ ;

STUDNA, AA ;

SCHWARTZ, B .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (03) :590-597

[2] DIELECTRIC FUNCTIONS AND OPTICAL-PARAMETERS OF SI, GE, GAP, GAAS, GASB, INP, INAS, AND INSB FROM 1.5 TO 6.0 EV [J].

ASPNES, DE ;

STUDNA, AA .

PHYSICAL REVIEW B, 1983, 27 (02) :985-1009

[3]

ASPNES DE, 1975, APPLIED OPTICS, V14, P22

[4]

Azzam RMA, 1977, ELLIPSOMETRY POLARIZ

[5] VARIABLE WAVELENGTH, VARIABLE ANGLE ELLIPSOMETRY INCLUDING A SENSITIVITIES CORRELATION TEST [J].

BUABBUD, GH ;

BASHARA, NM ;

WOOLLAM, JA .

THIN SOLID FILMS, 1986, 138 (01) :27-41

[6]

Efron U., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V700, P132

[7] VARIABLE ANGLE OF INCIDENCE SPECTROSCOPIC ELLIPSOMETRY - APPLICATION TO GAAS-ALXGA1-XAS MULTIPLE HETEROSTRUCTURES [J].

SNYDER, PG ;

ROST, MC ;

BUABBUD, GH ;

WOOLLAM, JA ;

ALTEROVITZ, SA .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (09) :3293-3302

[8]

SNYDER PG, IN PRESS APPLIED PHY

[9]

SNYDER PG, IN PRESS MATERIALS R, V77

[10] DIELECTRIC-PROPERTIES OF GAAS/ALGAAS MULTIPLE QUANTUM-WELL WAVE-GUIDES [J].

SONEK, GJ ;

BALLANTYNE, JM ;

CHEN, YJ ;

CARTER, GM ;

BROWN, SW ;

KOTELES, ES ;

SALERNO, JP .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1986, 22 (07) :1015-1018

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