SPUTTERING YIELDS OF SINGLE CRYSTALS BOMBARDED BY 1- TO 10-KEV AR+ IONS

被引：82

作者：

MAGNUSON, GD

CARLSTON, CE

机构：

来源：

关键词：

D O I：

10.1063/1.1729175

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3267 / &

共 41 条

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