EFFECT OF PHOSPHINE DECOMPOSITION ON THE GROWTH AND SUBSTRATE HEATING OF (100)INP IN THE HYDRIDE METHOD

被引:15
作者
HARROUS, M
LAPORTE, JL
CADORET, M
PARISET, C
CADORET, R
机构
[1] Lab de Cristallographie et Physique, des Milieux Condenses, Aubiere, Fr, Lab de Cristallographie et Physique des Milieux Condenses, Aubiere, Fr
关键词
INDIUM PHOSPHIDE - PHOSPHINE;
D O I
10.1016/0022-0248(87)90018-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:279 / 285
页数:7
相关论文
共 21 条
[1]  
BAN VS, 1973, J PHYS CHEM SOLIDS, V34, P1119
[2]   THEORETICAL TREATMENT OF GAAS GROWTH BY VAPOR-PHASE TRANSPORT FOR (001) ORIENTATION [J].
CADORET, R ;
CADORET, M .
JOURNAL OF CRYSTAL GROWTH, 1975, 31 (DEC) :142-146
[3]  
CADORET R, 1980, CURRENT TOPICS MATER, V5, pCH2
[4]  
ELHANDASSI A, 1986, THESIS CLERMONT 2
[5]   ELLIPSOMETRIC STUDY OF SURFACE TREATMENTS CARRIED OUT ON (100) INP INSIDE A VPE REACTOR [J].
GAUTARD, D ;
LAPORTE, JL ;
CADORET, M ;
PARISET, C .
JOURNAL OF CRYSTAL GROWTH, 1985, 71 (01) :125-135
[6]  
Gaydon A. G., 1953, DISSOCIATION ENERGIE
[7]   THE GROWTH OF EPITAXIAL INP BY THE CHLORIDE PROCESS IN NITROGEN AND IN THE PRESENCE OF PHOSPHINE [J].
GILES, PL ;
DAVIES, P ;
HASDELL, NB .
JOURNAL OF CRYSTAL GROWTH, 1983, 61 (03) :695-697
[9]  
GLASSTONE S, 1965, THEORY RATE PROCESSE
[10]  
GORDON JS, 1957, WADC TECH REP, P57