LASER TRIMMING OF NICR THIN-FILM RESISTORS .2. THIN-FILM RESISTORS WITH AN SIO2 PROTECTIVE LAYER

被引：2

作者：

FISCHER, A ^{[1
]}

SCHULTZE, V ^{[1
]}

机构：

[1] ACAD SCI GDR,INST PHYS TECH,O-6900 JENA,GERMANY

来源：

THIN SOLID FILMS | 1989年 / 182卷

关键词：

D O I：

10.1016/0040-6090(89)90241-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：35 / 45

页数：11

共 9 条

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[9] 2-PHASE MECHANISM OF LASER-INDUCED REMOVAL OF THIN ABSORBING FILMS .1. THEORY [J].

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