FOCUS-POSITION SENSING USING LASER SPECKLE

被引：12

作者：

MCLAUGHLIN, JL

机构：

[1] Itek Corporation, Lexington, MA

来源：

APPLIED OPTICS | 1979年 / 18卷 / 07期

关键词：

D O I：

10.1364/AO.18.001042

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The laser speckle resulting from a beam focused in proximity to a nonspecular surface has been examined, and a relationship between the speckle velocity and the distance from focus of the nonspecular surface is derived.An empirical verification of the relationship was performed, and the ability to determine surface position with respect to focus was demonstrated to an accuracy within 0.02 of the Rayleigh limit with the surface substantial distances from focus.© 1979 Optical Society of America.

引用

页码：1042 / 1045

页数：4