THE POLISHING EFFECT OF ZNO THIN-FILMS ON SAW FILTERS

被引：21

作者：

KADOTA, M

KONDO, C

IKEDA, T

KASANAMI, T

机构：

[1] Murata MFG. Co Ltd., Nagaokakyo shi, Kyoto

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷

关键词：

D O I：

10.7567/JJAPS.29S1.159

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

SAW filters in a structure of ZnO/IDT/glass, have periodic convex and concave roughness on the surface of ZnO thin films which is caused by IDT electrodes. This investigation reports that the convex and concave roughness affects the SAW velocity, and mechanical polishing of the ZnO thin films has great effect on SAW filter frequency characteristics.

引用

页码：159 / 161

页数：3