A SIMPLE METHOD TO PRODUCE QUASI-SIMULTANEOUS MULTIPLE-ENERGY HELIUM IMPLANTATION

被引:10
作者
PASZTI, F
FRIED, M
MANUABA, A
MEZEY, G
KOTAI, E
LOHNER, T
机构
关键词
D O I
10.1016/0022-3115(83)90273-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
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页码:330 / 333
页数:4
相关论文
共 11 条
[1]   ROLE OF INTEGRATED LATERAL STRESS IN SURFACE DEFORMATION OF HE-IMPLANTED SURFACES [J].
EERNISSE, EP ;
PICRAUX, ST .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (01) :9-17
[2]   DAMAGE OF NIOBIUM SURFACES CAUSED BY BOMBARDMENT WITH HE-4(+) IONS OF DIFFERENT ENERGIES TYPICAL FOR T-20 [J].
GUSEVA, MI ;
GUSEV, V ;
MARTYNENKO, YV ;
DAS, SK ;
KAMINSKY, M .
JOURNAL OF NUCLEAR MATERIALS, 1979, 85-6 (DEC) :1111-1115
[3]  
GUSEVA MI, 1976, J NUCL MATER, V63, P245, DOI 10.1016/0022-3115(76)90334-2
[4]   MICROSTRUCTURE OF NI AND STAINLESS-STEEL AFTER MULTIPLE ENERGY HE AND D IMPLANTATION [J].
JAGER, W ;
ROTH, J .
JOURNAL OF NUCLEAR MATERIALS, 1980, 93-4 (OCT) :756-766
[5]   PLURAL AND MULTIPLE SCATTERING OF LOW-ENERGY HEAVY PARTICLES IN SOLIDS [J].
MEYER, L .
PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1971, 44 (01) :253-&
[6]   BACKSCATTERING METHOD FOR THE STUDY OF BLISTERING WITH ENERGY-DISTRIBUTED HE PARTICLES [J].
OKUDA, S ;
KUWAHARA, H .
APPLIED PHYSICS LETTERS, 1981, 38 (01) :23-24
[7]   INVESTIGATIONS ON BLISTERING AND EXFOLIATION IN GOLD BY 3.52 MEV HELIUM-IONS [J].
PASZTI, F ;
POGANY, L ;
MEZEY, G ;
KOTAI, E ;
MANUABA, A ;
POCS, L ;
GYULAI, J ;
LOHNER, T .
JOURNAL OF NUCLEAR MATERIALS, 1981, 98 (1-2) :11-17
[8]  
RISCH M, 1977, 1976 P INT S PLASM W, P391
[9]   BLISTERING AND EXFOLIATION OF ZIRCONIUM, INCONEL-718, STAINLESS STEEL-316 AND ALUMINUM BY 2MEV HE+ BEAM [J].
SOOD, DK ;
SUNDARARAMAN, M ;
DEB, SK ;
KRISHNAN, R ;
MEHTA, MK .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1979, 26 (01) :1308-1311
[10]  
STJACQUES RG, 1976, J NUCL MATER, V63, P273, DOI 10.1016/0022-3115(76)90338-X