NONDESTRUCTIVE SINGLE-SHOT SOFT-X-RAY LITHOGRAPHY AND CONTACT MICROSCOPY USING A LASER-PRODUCED PLASMA SOURCE

被引：12

作者：

ROSSER, RJ

FEDER, R

NG, A

ADAMS, F

CELLIERS, P

SPEER, RJ

机构：

[1] IBM CORP, THOMAS J WATSON RES CTR, YORKTOWN HTS, NY 10598 USA

[2] UNIV LONDON IMPERIAL COLL SCI & TECHNOL, BLACKETT LAB, LONDON SW7 2BZ, ENGLAND

[3] UNIV BRITISH COLUMBIA, DEPT PHYS, VANCOUVER V6T 2A6, BC, CANADA

来源：

APPLIED OPTICS | 1987年 / 26卷 / 19期

关键词：

D O I：

10.1364/AO.26.004313

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：4313 / 4318

页数：6

共 26 条

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