NITROBENZYL ESTER CHEMISTRY FOR POLYMER PROCESSES INVOLVING CHEMICAL AMPLIFICATION

被引:98
作者
HOULIHAN, FM
SHUGARD, A
GOODEN, R
REICHMANIS, E
机构
[1] AT&T, Murray Hill, NJ, USA, AT&T, Murray Hill, NJ, USA
关键词
D O I
10.1021/ma00185a019
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
引用
收藏
页码:2001 / 2006
页数:6
相关论文
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