DESIGN CONSIDERATIONS FOR MICROMACHINED ELECTRIC ACTUATORS

被引：73

作者：

BART, SF

LOBER, TA

HOWE, RT

LANG, JH

SCHLECHT, MF

机构：

来源：

SENSORS AND ACTUATORS | 1988年 / 14卷 / 03期

关键词：

D O I：

10.1016/0250-6874(88)80074-X

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：269 / 292

页数：24

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