QUENCHING RATES OF AR METASTABLES IN RADIO-FREQUENCY GLOW-DISCHARGES

[1] INELASTIC-SCATTERING OF LOW-ENERGY ELECTRONS BY METASTABLE ATOMS [J]. CHEMICAL PHYSICS LETTERS, 1984, 109 (05) : 450 - 455

[2] BARANOV IY, 1981, OPT SPEKTROSK+, V51, P571

[3] BURTON RH, 1984, DRY ETCHING MICROELE

[4] CHEN FF, 1985, INTRO PLASMA PHYSICS, P296

[5] Coburn J.W., 1982, PLASMA CHEM PLASMA P, V2, P1, DOI 10.1007/BF00566856

[6] DAVIS GP, 1983, J APPL PHYS, V54, P3080, DOI 10.1063/1.332514

[7] Demas J., 1983, EXCITED STATE LIFETI, P50

[8] DILONARDO M, 1986, MATER RES SOC S P, V68, P287

[9] ELECTRON-TRANSPORT PARAMETERS AND EXCITATION RATES IN ARGON [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1983, 16 (09) : 1611 - 1621

[10] Flamm D.L., 1981, PLASMA CHEM PLASMA P, V1, P317, DOI [10.1007/bf00565992, DOI 10.1007/BF00565992]

[1] INELASTIC-SCATTERING OF LOW-ENERGY ELECTRONS BY METASTABLE ATOMS [J]. CHEMICAL PHYSICS LETTERS, 1984, 109 (05) : 450 - 455

[2] BARANOV IY, 1981, OPT SPEKTROSK+, V51, P571

[3] BURTON RH, 1984, DRY ETCHING MICROELE

[4] CHEN FF, 1985, INTRO PLASMA PHYSICS, P296

[5] Coburn J.W., 1982, PLASMA CHEM PLASMA P, V2, P1, DOI 10.1007/BF00566856

[6] DAVIS GP, 1983, J APPL PHYS, V54, P3080, DOI 10.1063/1.332514

[7] Demas J., 1983, EXCITED STATE LIFETI, P50

[8] DILONARDO M, 1986, MATER RES SOC S P, V68, P287

[9] ELECTRON-TRANSPORT PARAMETERS AND EXCITATION RATES IN ARGON [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1983, 16 (09) : 1611 - 1621

[10] Flamm D.L., 1981, PLASMA CHEM PLASMA P, V1, P317, DOI [10.1007/bf00565992, DOI 10.1007/BF00565992]