LASER DEPOSITION OF THIN-FILMS OF HIGH T(C) SUPERCONDUCTORS - INSITU ANALYSIS OF THE TRANSIENT SPECIES FORMED IN THE PLUME AND SURFACE DIAGNOSTICS OF THE DEPOSITED MATERIAL

被引:8
作者
GUIDONI, AG [1 ]
PETTITI, I [1 ]
MORONE, A [1 ]
MAROTTA, V [1 ]
SNELS, M [1 ]
PARISI, GP [1 ]
BENTIVENGA, G [1 ]
机构
[1] CNR,IST MAT SPECIALI,I-85050 TITO,ITALY
关键词
D O I
10.1016/0169-4332(93)90535-J
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The present work reports some results on the laser deposition technique of high T(c) superconducting films. In situ analysis of transient species formed in the plume and surface diagnostic of the deposited Bi-Sr-Ca-Cu-0 (BSCCO) thin films has been performed. It has been ascertained that mixed oxide cluster ions are produced in the plume together with neutral and ionized atoms of constituent material. The effect of annealing parameters on the structure and quality of deposited thin films of BSCCO is reported and discussed.
引用
收藏
页码:365 / 369
页数:5
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