3-DIMENSIONAL IMAGING BY SUB-NYQUIST SAMPLING OF WHITE-LIGHT INTERFEROGRAMS

被引：145

作者：

DEGROOT, P

DECK, L

机构：

[1] Zygo Corporation, Middlefield, CT, 06455, Laurel Brook Road

来源：

OPTICS LETTERS | 1993年 / 18卷 / 17期

关键词：

D O I：

10.1364/OL.18.001462

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate a simple way of increasing the data acquisition and processing speed in a scanning white-light interferometer for surface topography measurement. The method consists of undersampling interference data and processing the resultant sub-Nyquist interferograms in the frequency domain to create complete three-dimensional images. Experimental results on a 20-mum step height standard show a measurement repeatability of 10 nm.

引用

页码：1462 / 1464

页数：3

共 8 条

[1]

Balasubramanian N., 1982, U.S. patent, Patent No. [4,340,306B2, 4340306]

[2] INTERFEROMETRIC PROFILER FOR ROUGH SURFACES [J].

CABER, PJ .

APPLIED OPTICS, 1993, 32 (19) :3438-3441

[3] 3-DIMENSIONAL IMAGE REALIZATION IN INTERFERENCE MICROSCOPY [J].

CHIM, SSC ;

KINO, GS .

APPLIED OPTICS, 1992, 31 (14) :2550-2553

[4] ABSOLUTE OPTICAL RANGING USING LOW COHERENCE INTERFEROMETRY [J].

DANIELSON, BL ;

BOISROBERT, CY .

APPLIED OPTICS, 1991, 30 (21) :2975-2979

[5]

DAVIDSON M, 1987, SOLID STATE TECHNOL, V30, P57

[6] 3-DIMENSIONAL SENSING OF ROUGH SURFACES BY COHERENCE RADAR [J].

DRESEL, T ;

HAUSLER, G ;

VENZKE, H .

APPLIED OPTICS, 1992, 31 (07) :919-925

[7] HIGH-RESOLUTION OCDR FOR TESTING INTEGRATED-OPTICAL WAVE-GUIDES - DISPERSION-CORRUPTED EXPERIMENTAL-DATA CORRECTED BY A NUMERICAL ALGORITHM [J].

KOHLHAAS, A ;

FROMCHEN, C ;

BRINKMEYER, E .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1991, 9 (11) :1493-1502

[8]

Montgomery P. C., 1993, Proceedings of the SPIE - The International Society for Optical Engineering, V1755, P12, DOI 10.1117/12.140772

← 1 →