CHEMICAL VAPOR DEPOSITION OF COBALT METAL FROM COBALT(2) ACETYLACETONATE

The chemical vapor deposition characteristics of cobalt (II) acetylacetonate on fused quartz substrates have been investigated. In a stream of dry hydrogen, at atmospheric pressure, only about 70 per cent of the cobalt volatilizes under the conditions employed. The remainder of the cobalt is converted to a nonvolatile form as the result of premature thermal decomposition in the sample container. That portion of the acetylacetonate which volatilizes, however, can be reduced almost completely to bright and relatively pure deposits of cobalt metal foil on quartz, at optimum substrate temperatures in the range 275-310°C. Hydrogen gas is shown to be essential to the reduction, as well as acting as a carrier gas. © 1969.