METHOD TO SOLVE IMPURITY DIFFUSION EQUATION WITH IONIZATION AND RECOMBINATION SOURCE TERMS

被引:13
作者
OKAMOTO, M [1 ]
AMANO, T [1 ]
机构
[1] OSAKA UNIV,FAC ENGN,PLASMA PHYS LAB,SUITA,OSAKA 565,JAPAN
关键词
D O I
10.1016/0021-9991(78)90100-6
中图分类号
TP39 [计算机的应用];
学科分类号
081203 ; 0835 ;
摘要
引用
收藏
页码:80 / 86
页数:7
相关论文
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