FAST SELF-COMPENSATING ELIPSOMETER

被引：42

作者：

MATHIEU, HJ

MCCLURE, DE

MULLER, RH

机构：

[1] UNIV CALIF,DEPT CHEM ENGN,BERKELEY,CA 94720

[2] LAWRENCE BERKELEY LAB,INORG MAT RES DIV,BERKELEY,CA 94720

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1974年 / 45卷 / 06期

关键词：

D O I：

10.1063/1.1686739

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：798 / 802

页数：5

共 15 条

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CAHAN, BD ;

SPANIER, RF .

SURFACE SCIENCE, 1969, 16 :166-&

[2]

GIBA WT, 1974, MECHANICAL COMPONENT

[3]

GU H, 1971, THESIS U CALIFORNIA

[4] DESIGN AND OPERATION OF ETA, AN AUTOMATED ELLIPSOMETER [J].

HAUGE, PS ;

DILL, FH .

IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1973, 17 (06) :472-489

[5] USE OF ELLIPSOMETRY IN STUDY OF CORROSION [J].

KRUGER, J .

CORROSION, 1966, 22 (04) :88-&

[6] CIRCUIT DESIGN FOR AN ELECTRONIC SELF-NULLING ELLIPSOMETER [J].

LAYER, HP .

SURFACE SCIENCE, 1969, 16 :177-&

[7]

MATHIEU HJ, 1973, SELF COMPENSATING AU

[8]

MATHIEU HJ, 1973, FARADAY CELL SOLENOI

[9]

MULLER R, TO BE PUBLISHED

[10]

MULLER RH, 1973, ADV ELECTROCHEMISTRY, V9

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