SCANNING PHOTOELECTRON MICROSCOPE WITH A ZONE PLATE GENERATED MICROPROBE

被引：42

作者：

ADE, H

KIRZ, J

HULBERT, S

JOHNSON, E

ANDERSON, E

KERN, D

机构：

[1] BROOKHAVEN NATL LAB,NATL SYNCHROTRON LIGHT SOURCE,UPTON,NY 11973

[2] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,CTR XRAY OPT,BERKELEY,CA 94720

[3] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1990年 / 291卷 / 1-2期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1016/0168-9002(90)90046-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We describe instrumentation of a scanning photoelectron microscope (SPEM), which we are presently developing and commissioning at the X1A beamline of the National Synchrotron Light Source (NSLS). This instrument is designed to use the soft-X-ray undulator (SXU) at the NSLS as a high-brightness source to illuminate a Fresnel zone plate, thus forming a finely focused probe, ≤ 0.2 μm in size, upon the specimen surface. A grating monochromator selects the photon energy in the 400-800 eV range with an energy resolution better than 1 eV. The expected flux in the focus is in the range 5 × 107-109 photons s-1. A single pass cylindrical mirror analyzer (CMA) is used to record photoemission spectra, or to form an image within a fixed electron energy bandwidth as the specimen is mechanically scanned. As a first test, a 1000-mesh Au grid was successfully imaged with Au 4f primary photoelectrons, achieving a resolution of about 1 μm. © 1990.

引用

页码：126 / 131

页数：6

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