PREPARATION OF HIGH-TC Y-BA-CU-O AND BI-SR-CA-CU-O THIN-FILMS BY RF-MAGNETRON SPUTTERING

被引：5

作者：

GAWALEK, W

MICHALKE, W

BRUCHLOS, H

EICK, T

HERGT, R

SCHMIDT, G

机构：

[1] Akad der Wissenschaften der DDR, Germany

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1988年 / 109卷 / 02期

关键词：

Bismuth Compounds--Thin Films - Ceramic Materials--Thin Films - Oxides - Sputtering - Yttrium Compounds--Thin Films;

D O I：

10.1002/pssa.2211090216

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Films were deposited on YSZ ceramic and single-crystal MgO substrates. The aim of the investigations was to find proper conditions to prepare superconducting thin films and to ascertain their basic properties. The cation stoichiometry and crystal structure of the films were controlled by varying preparation conditions as target composition, sputtering gas composition, and annealing conditions. From X-ray diffraction analysis, it is found that Y-Ba-Cu-O and Bi-Sr-Ca-Cu-O films on MgO have a strong c-axis orientation of crystallites perpendicular to the substrate surface.

引用

页码：503 / 509

页数：7

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