DESIGN AND ANALYSIS OF A HIGH INTENSITY FAST OXYGEN ATOM SOURCE

被引：26

作者：

MILLER, DR

PATCH, DF

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1969年 / 40卷 / 12期

关键词：

D O I：

10.1063/1.1683863

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A mixture of 5% O2 in He has been used in a rf discharge at pressures from 15 to 70 Torr to produce a free jet source of a high intensity energetic beam of atomic oxygen. Intensities of 1017 atoms/sec/sr are predicted and energies of 0.33 eV have been measured. A time-of-flight analysis of the beam properties is presented and indicates that the source temperature is near 620 K. © 1969 The American Institute of Physics.

引用

页码：1566 / &

共 21 条

[1] VELOCITY DISTRIBUTIONS IN MOLECULAR BEAMS FROM NOZZLE SOURCES [J].