ENHANCED DIFFUSION MECHANISMS

被引:167
作者
BOURGOIN, JC
CORBETT, JW
机构
[1] Groupe Phys. Solides, E.N.S., Univ. Paris 7, France
来源
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1978年 / 36卷 / 3-4期
关键词
CRYSTALS - RADIATION DAMAGE - SEMICONDUCTOR MATERIALS;
D O I
10.1080/00337577808240846
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
The phenomenology is reviewed for several enhanced diffusion mechanisms: the normal ionization-enhanced diffusion mechanism, the Bourgoin mechanism, the energy-release mechanism and some recoil mechanisms. Application of these mechanisms are discussed for crystalline and amorphous semiconductors, super-ionic materials and insulators in radiation damage, impurity and self-diffusion, ion-implantation, and dislocation-motion-experiments.
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页码:157 / 188
页数:32
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