CONTROL OF HYDROGEN CONTENT OF BORON THIN-FILMS PRODUCED IN A DC TOROIDAL DISCHARGE

被引：22

作者：

TOYODA, H

SUGAI, H

ISOZUMI, T

OKUDA, T

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 11期

关键词：

D O I：

10.1063/1.98870

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：798 / 800

页数：3

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