OPTICAL PROCESSING TECHNIQUES IN QUALITY-CONTROL OF MICROMECHANICS

被引：8

作者：

INDEBETOUW, G ^{[1
]}

TSCHUDI, T ^{[1
]}

STEFFEN, J ^{[1
]}

机构：

[1] UNIV BERN,INST APPL PHYS,CH-3000 BERN,SWITZERLAND

来源：

APPLIED OPTICS | 1978年 / 17卷 / 06期

关键词：

D O I：

10.1364/AO.17.000911

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：911 / 916

页数：6

共 19 条

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