X-RAY AND ELECTRON-MICROSCOPY STUDY OF AMORPHOUS BORON-NITRIDE FILMS

被引:7
作者
GRIGORIEW, H
LECIEJEWICZ, J
机构
[1] Inst of Nuclear Chemistry &, Technology, Poland
关键词
8;
D O I
10.1016/0040-6090(89)90656-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:L75 / L79
页数:5
相关论文
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