ACCELEROMETER SYSTEMS WITH SELF-TESTABLE FEATURES

[1] BLECH JJ, 1983, T ASME, V105, P615

[2] BUSER RA, 1989, FEB P IEEE MICR EL M, P94

[3] GRIFFIN WS, 1966, J BASIC ENG, P451

[4] GUCKEL H, COMMUNICATION

[5] BATCH-FABRICATED SILICON ACCELEROMETER [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) : 1911 - 1917

[6] ROYLANCE LM, 1977, THESIS STANFORD U

[7] SULOFF RE, 1985, SOLID STATE SILICON

[8] 1982, CRC HDB CHEM PHYSICS, pF47

[1] BLECH JJ, 1983, T ASME, V105, P615

[2] BUSER RA, 1989, FEB P IEEE MICR EL M, P94

[3] GRIFFIN WS, 1966, J BASIC ENG, P451

[4] GUCKEL H, COMMUNICATION

[5] BATCH-FABRICATED SILICON ACCELEROMETER [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) : 1911 - 1917

[6] ROYLANCE LM, 1977, THESIS STANFORD U

[7] SULOFF RE, 1985, SOLID STATE SILICON

[8] 1982, CRC HDB CHEM PHYSICS, pF47