EFFECTS OF ULTRATHIN OXIDES IN CONDUCTING MIS STRUCTURES ON GAAS

被引:20
作者
CHILDS, RB
RUTHS, JM
SULLIVAN, TE
FONASH, SJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 04期
关键词
D O I
10.1116/1.569795
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1397 / 1401
页数:5
相关论文
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