INTER-LABORATORY COMPARISON OF THE CHEMICAL-ANALYSIS OF SILICON-NITRIDE

被引：8

作者：

ADELHELM, C ^{[1
]}

HIRSCHFELD, D ^{[1
]}

机构：

[1] KRUPP IND & STRAHLBAU WERK GMBH,SPARTE SYST TECH,W-4300 ESSEN,GERMANY

来源：

FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY | 1992年 / 342卷 / 1-2期

关键词：

D O I：

10.1007/BF00321706

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The results of a round robin for the determination of nitrogen, oxygen and carbon and the common metallic impurities like Al, Ca, Fe, Mg and Na in silicon nitride are reported. The following analytical methods have been tested: nitrogen by acid decomposition under pressure followed by Kjeldahl distillation; oxygen by carrier-gas hot extraction; carbon by combustion in oxygen and infrared detection; metallic impurities after acid decomposition under pressure and evaporation of silicon fluoride by AAS or ICP-OES.

引用

页码：125 / 127

页数：3

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