ELECTRIC RESISTIVITY OF INDIUM(III) OXIDE-TIN(IV) OXIDE-FILMS PREPARED BY THERMAL-DECOMPOSITION OF INDIUM(III) NITRATE AND TIN(IV) NITRATE

被引：1

作者：

OGIHARA, S

KINUGAWA, K

NAKAYAMA, M

机构：

[1] HITACHI LTD,MOBARA WORKS,MOBARA 297,JAPAN

[2] TOKYO OHKA KOGYO CO LTD,NAKAHARA KU,KAWASAKI 211,JAPAN

来源：

NIPPON KAGAKU KAISHI | 1980年 / 09期

关键词：

D O I：

10.1246/nikkashi.1980.1345

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：1345 / 1351

页数：7

共 8 条

[1] MAGNETRON DC REACTIVE SPUTTERING OF TITANIUM NITRIDE AND INDIUM-TIN OXIDE [J].

CLARKE, PJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01) :141-142

[2] ELECTRON-CONCENTRATION AND MOBILITY IN IN2O3 [J].

DEWIT, JHW ;

VANUNEN, G ;

LAHEY, M .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1977, 38 (08) :819-824

[3] METAL-OXYGEN VIBRATION MODES IN THE INFRA-RED SPECTRA OF ALUMINIUM, GALLIUM AND INDIUM TRIS-ACETYLACETONATES [J].

DJORDJEVIC, C .

SPECTROCHIMICA ACTA, 1961, 17 (04) :448-453

[4]

DONAGHEY LE, 1976, 6TH P INT C CVD

[5] PROPERTIES OF SN-DOPED IN2O3 FILMS PREPARED BY RF SPUTTERING [J].

FAN, JCC ;

BACHNER, FJ .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (12) :1719-1725

[6] CHEMICAL VAPOR-DEPOSITION OF TRANSPARENT ELECTRICALLY CONDUCTING LAYERS OF INDIUM OXIDE DOPED WITH TIN [J].

KANE, J ;

SCHWEIZER, HP ;

KERN, W .

THIN SOLID FILMS, 1975, 29 (01) :155-163

[7]

LAPPERT MF, 1961, DEV INORGANIC POLYME, P264

[8]

SIUTA V, 1978, 28TH ECC P, P51

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