QUADRUPOLE MASS-SPECTROMETER FOR RESIDUAL-GAS ANALYSIS AND SIMS APPLICATION

被引：2

作者：

HARS, G

SOLYOM, A

GIBER, J

机构：

[1] Department of Atomic Physics, Technical University Budapest, Budapest, H-1111

来源：

FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY | 1991年 / 341卷 / 1-2期

关键词：

D O I：

10.1007/BF00322107

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A combined secondary ion optics has been developed which includes both the ion source for residual gas analysis and the secondary ion optics for Secondary Ion Mass Spectrometry (SIMS). The change from one mode to the other can be done by changing only the electric connections without venting the vacuum chamber. The presented combination of the two methods allows the interpretation of SIMS spectra with higher reliability.

引用

页码：57 / 59

页数：3

共 7 条

[1] SURFACE INVESTIGATION OF SOLIDS BY STATICAL METHOD OF SECONDARY ION MASS SPECTROSCOPY (SIMS) [J].