HEAVY-ION BACKSCATTERING ANALYSIS WITH A TIME-OF-FLIGHT DETECTOR

被引：25

作者：

DOBELI, M

HAUBERT, PC

LIVI, RP

SPICKLEMIRE, SJ

WEATHERS, DL

TOMBRELLO, TA

机构：

[1] Division of Physics, Mathematics and Astronomy, California Institute of Technology, Pasadena

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1990年 / 47卷 / 02期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1016/0168-583X(90)90023-N

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We describe a time-of-flight spectrometer for heavy ion RBS. Start and stop signals for the flight time measurement are obtained by detecting the secondary electrons emitted from two thin foils traversed by the ions. MicroChannel plates are used to provide very fast timing signals. The achieved energy resolution of the system is 30 keV (FWHM) at 2 MeV and 75 keV at 10 MeV for 35Cl, which permits a depth resolution of approximately 100 Å for indium profiles in GaAs (normal beam incidence). For 16O the energy resolution is 45 keV at 6 MeV and 110 keV at 12 MeV. We present RBS spectra of thin-layer multielement targets. As possible applications we show indium profiles in InxGa1-xAs heterostructures, As and Ga profiles in a thin layer GaAs sample and a measurement of the silver isotopic ratio in a sputtering experiment. © 1990.

引用

页码：148 / 154

页数：7

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