SILICON DIOXIDE THIN-FILMS PREPARED BY THERMAL-DECOMPOSITION OF SILICON TETRAACETATE

被引：4

作者：

MARUYAMA, T

ABURAI, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 12期

关键词：

D O I：

10.1143/JJAP.27.L2268

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L2268 / L2270

页数：3

共 4 条

[1] RAMAN AND INFRARED-SPECTRA ON SILICA-GEL EVOLVING TOWARD GLASS
BERTOLUZZA, A
FAGNANO, C
MORELLI, MA
GOTTARDI, V
GUGLIELMI, M
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1982, 48 (01) : 117 - 128
[2] SUPERCONDUCTING YBA2CU3O7-X THIN-FILMS PREPARED BY THERMAL-DECOMPOSITION OF METALLIC COMPLEX SALTS
MARUYAMA, T
NISHIKAWA, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (09): : L1693 - L1695
[3] INDIUM-TIN OXIDE THIN-FILMS PREPARED BY THERMAL-DECOMPOSITION OF METALLIC COMPLEX SALTS
MARUYAMA, T
KOJIMA, A
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (10): : L1829 - L1831
[4] YAMAMOTO Y, 1982, YOGYO-KYOKAI-SHI, V90, P366