MASS-SPECTROMETRY OF A SILANE GLOW-DISCHARGE DURING PLASMA DEPOSITION OF A-SI-H FILMS

被引：141

作者：

TURBAN, G

CATHERINE, Y

GROLLEAU, B

机构：

来源：

THIN SOLID FILMS | 1980年 / 67卷 / 02期

关键词：

D O I：

10.1016/0040-6090(80)90464-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：309 / 320

页数：12

共 21 条

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