DOES LOCAL THERMODYNAMIC-EQUILIBRIUM EXIST IN THE EXCITATION PROCESS OF SPUTTERED ATOMS

被引:13
作者
TSONG, IST
YUSUF, NA
机构
[1] Materials Research Laboratory, The Pennsylvania State University, University Park
关键词
D O I
10.1016/0039-6028(79)90352-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The optical line intensities from a series of ion-bombarded oxide glasses are fitted to two different equations relating the intensity and the energy of the upper level. The plots suggest that the existence of local thermodynamic equilibrium in the excitation process during sputtering is unlikely. © 1979.
引用
收藏
页码:417 / 428
页数:12
相关论文
共 16 条
  • [1] THERMODYNAMIC APPROACH TO QUANTITATIVE INTERPRETATION OF SPUTTERED ION MASS-SPECTRA
    ANDERSEN, CA
    HINTHORNE, JR
    [J]. ANALYTICAL CHEMISTRY, 1973, 45 (08) : 1421 - 1438
  • [2] QUANTUM EFFICIENCY AND INSTRUMENTAL POLARIZATION OF AN OPTICAL MONOCHROMATOR
    ANDERSEN, N
    JENSEN, K
    JEPSEN, J
    MELSKENS, J
    VEJE, E
    [J]. APPLIED OPTICS, 1974, 13 (08) : 1965 - 1970
  • [3] CORLISS CH, 1962, NBS53 MON
  • [4] PROBLEM OF WHETHER EXCITED-STATES AMONGST SPUTTERED PARTICLES ARE OF THERMAL ORIGIN
    GOODZAMIN, CJ
    SHEHATA, MT
    SQUIRES, DB
    KELLY, R
    [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 35 (03): : 139 - 149
  • [5] HEISE H, 1974, ASTRON ASTROPHYS, V34, P275
  • [6] THEORY OF THERMAL SPUTTERING
    KELLY, R
    [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 32 (1-2): : 91 - 100
  • [7] QUANTITATIVE SURFACE ANALYSIS USING ION-INDUCED SECONDARY ION AND PHOTON EMISSION
    MACDONALD, RJ
    MARTIN, PJ
    [J]. SURFACE SCIENCE, 1977, 66 (02) : 423 - 435
  • [8] MACDONALD RJ, 1978, SURFACE SCI, V75, P155
  • [9] SPECTROSCOPY OF ION-INDUCED PHOTON EMISSION AND ITS APPLICATION TO QUANTITATIVE SURFACE ANALYSIS
    MARTIN, PJ
    MACDONALD, RJ
    [J]. SURFACE SCIENCE, 1977, 62 (02) : 551 - 566
  • [10] MILES BM, 1969, NBS474 TECHN NOT