METALORGANIC DEPOSITION OF HIGH-JCBA2YCU3O7-X THIN-FILMS FROM TRIFLUOROACETATE PRECURSORS ONTO (100) SRTIO3

被引:233
作者
MCINTYRE, PC
CIMA, MJ
NG, MF
机构
[1] Ceramics Processing Research Laboratory, Massachusetts Institute of Technology, Cambridge
关键词
D O I
10.1063/1.346233
中图分类号
O59 [应用物理学];
学科分类号
摘要
Superconducting thin films of Ba2YCu3O7-x were prepared on (100) SrTiO3 substrates by metalorganic deposition (MOD) of trifluoroacetate precursors. The best electrical transport properties were measured in films annealed at 750 °C in a humid, low PO2 gas mixture followed by slow cooling in oxygen. These specimens had sharp resistive transitions with Tc above 90 K and zero-field critical current densities in excess of 106 A/cm2 at 77 K. Critical current densities of this magnitude have not previously been reported in films produced by MOD. The highest Jc obtained in films fired only in humid oxygen was 3×105 A/cm2. Annealing at high temperature in the low PO2 atmosphere also resulted in a smoother surface morphology than was observed in the oxygen-fired films. Use of the low PO2 furnace gas appeared to suppress the formation of b-axis normal oriented grains in the superconducting films and to strengthen c-axis normal texture. X-ray powder diffraction indicated the presence of a-axis normal textured material in the films, although it was not present as separate microstructural features which could be identified by scanning electron microscopy.
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页码:4183 / 4187
页数:5
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