CHARACTERIZATION OF MAGNETIC MULTILAYERS BY GRAZING-INCIDENCE X-RAY REFLECTIVITY

被引：7

作者：

TANNER, BK

HUDSON, JM

机构：

[1] Department of Physics, Durham University, Durham, South Road

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1992年 / 28卷 / 05期

关键词：

D O I：

10.1109/20.179613

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The application of grazing incidence X-ray reflectivity measurements to the characterization of metallic multilayers is described. Use of simulation permits interface roughness to be determined to a precision of about 0.1 nm r.m.s. from the specular reflectivity profile. Measurement of the diffuse scatter permits interdiffusion to be distinguished in principle from interface roughness. Localization of strong diffuse scatter around the Bragg peaks of superlattices provides evidence for coherency in the roughness through the superlattice thickness.

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页码：2736 / 2741

页数：6

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