FABRICATION OF YBA2CU3OX THIN-FILM FLUX TRANSFORMERS USING A NOVEL MICROSHADOW MASK TECHNIQUE FOR IN-SITU PATTERNING

被引：8

作者：

STRIKOVSKI, MD ^{[1
]}

KAHLMANN, F ^{[1
]}

SCHUBERT, J ^{[1
]}

ZANDER, W ^{[1
]}

GLYANTSEV, V ^{[1
]}

OCKENFUSS, G ^{[1
]}

JIA, CL ^{[1
]}

机构：

[1] KFA JULICH GMBH,FORSCHUNGSZENTRUM,INST FESTKORPERFORSCH,D-52425 JULICH,GERMANY

来源：

APPLIED PHYSICS LETTERS | 1995年 / 66卷 / 25期

关键词：

D O I：

10.1063/1.113784

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A novel microshadow mask technique for in situ patterning of multilayers is presented. It is ideally suited to fabricate YBa2Cu 3Ox(YBCO) and insulator lines with gently sloping edges, needed for high quality insulated superconducting crossovers. The critical current density jc (T=77 K) of a YBCO/SrTiO3/YBCO crossover exceeds 2×106 A/cm2 in both the bottom and the top YBCO stripline. The insulating SrTiO3 layer of 200 nm thickness displays a high resistivity of ρ>108 Ω cm (T=77 K). The extremely smooth morphology of the edges has been revealed by cross sectional transmission electron microscopy, indicating a stepflow mechanism of YBCO growth. Multiturn flux transformers with a 15 μm linewidth input coil spiral have been fabricated by this microshadow mask technique. A transformer with a pickup loop area of 7 mm2 has been coupled to a 1 mm2 washer dc SQUID in flip chip geometry. In comparison to the bare SQUID a magnetic flux gain factor of 9 has been obtained. The white noise level of this setup was determined to be 8×10-5 Φ0/ Hz1/2 at 77 K. It was entirely due to the intrinsic noise of the employed dc SQUID itself. The 1/f noise level increased a factor of 2.© 1995 American Institute of Physics.

引用

页码：3521 / 3523

页数：3

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