CRYSTALLISATION OF THIN AMORPHOUS TANTALUM OXIDE FILMS HEATED IN AIR OR VACUO, AND STRUCTURE OF CRYSTALLINE OXIDE

被引:46
作者
HARVEY, J
WILMAN, H
机构
来源
ACTA CRYSTALLOGRAPHICA | 1961年 / 14卷 / 12期
关键词
D O I
10.1107/S0365110X61003703
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:1278 / &
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